In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm enjoys a great significance in investigating and understa...

In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...

In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

In the field of photoelectric sensing and measurement, laser triangulation is a superior and widely used technology due to its advantages of high accuracy, rapidity, and non-contact. This paper first applied it to the measurement of pressure, and proposed and designed a laser-type pressure sensor. The sensor measured the center deflection of the circular pressure-sensitive diaphragm using the l...

This paper presents a new yet simple family of microactuators that provide both large displacements ( m) and high forces ( N) hence suitable for microvalves. The actuators use the high volumetric expansion of a sealed, surface micromachined patch of paraffin heated near its melting point to deform a sealing diaphragm. Two types of actuators were fabricated using a simple 2-mask process. The fir...

Elastic element mechanical pressure gages consisting diaphragm are basically used for the differential pressure measurement. In FODPS, diaphragm acts as a reflector. A flexible disc of plastic is used as a diaphragm to convert the measuring pressure to the deflection of diaphragm. Concentric corrugations are designed to linearise the deflections according to pressure. Reference and measuring pr...

Elastic element mechanical pressure gages consisting diaphragm are basically used for the differential pressure measurement. In FODPS, diaphragm acts as a reflector. A flexible disc of plastic is used as a diaphragm to convert the measuring pressure to the deflection of diaphragm. Concentric corrugations are designed to linearise the deflections according to pressure. Reference and measuring pr...